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TECHNICAL PAPERS

Recent Advances in Acoustic Microscopy for Nondestructive Evaluation

[+] Author and Article Information
C. Miyasaka, B. R. Tittmann

Department of Engineering Science and Mechanics, The Pennsylvania State University, 212 Earth Engineering Sciences Building, University Park, PA 16802

J. Pressure Vessel Technol 122(3), 374-378 (Apr 12, 2000) (5 pages) doi:10.1115/1.556195 History: Received March 01, 2000; Revised April 12, 2000
Copyright © 2000 by ASME
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References

Lemons,  R. A., and Quate,  C. F., 1974, “Acoustic Microscope-Scanning Version,” Appl. Phys. Lett., 24, pp. 163–165.
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Jipson,  V. B., and Quate,  C. F., 1978, “Acoustic Microscopy at Optical Wavelength,” Appl. Phys. Lett., 32, pp. 789–791.
Hadimioglu,  B., and Quate,  C. F., 1983, “Water Acoustic Microscopy at Suboptical Waterlengths,” Appl. Phys. Lett., 43, pp. 1006–1007.
Heiserman,  J., Rugar,  D., and Quate,  C. F., 1980, “Cryogenic Acoustic Microscopy,” J. Acoust. Soc. Am., 67, pp. 1629–1637.
Foster,  J. S., and Rugar,  D., 1983, “High Resolution Acoustic Microscopy in Superfluid Helium,” Appl. Phys. Lett., 42, pp. 869–871.
Khuri-Yakub, B. T., and Chou, C.-H., 1986, “Acoustic Microscope Lenses With Shear Wave Transducers,” IEEE 1986 Ultrasonic Symposium, pp. 741–744, IEEE, New York, NY.
Davids,  D. A., We,  P. Y., and Chizhik,  D., 1989, “Restricted Aperture Acoustic Microscope Lens for Rayleigh Wave Imaging,” Appl. Phys. Lett., 54, No. 17, pp. 1639–1641.
Atalar, A., Koymen, H., and Degertekin, L., 1990, “Characterization of Layered Materials by the Lamb Wave Lens,” Proc., IEEE 1990 Ultrasonics Symposium, pp. 359–362.
Atalar, A., Ishikawa, I., Ogura, Y., and Tomita, K., 1993, “Anisotropy Sensitivity of an Acoustic Lens With Slit Aperture,” Proc., IEEE 1993 Ultrasonics Symposium, pp. 613–616.
Hutchins, D. A., and Schindel, D. W., 1994, “Advances in Non-Contact and Air-Coupled Transducer,” Proc., IEEE 1994 Ultrasonics Symposium, pp. 1245–1254.
Miyasaka,  C., Tittmann,  B. R., and Ohno,  M., 1999, “Practical Shear Wave Lens Design for Improved Resolution With Acoustic Microscope,” Res. Nondestruct. Eval., 11, pp. 97–116.
Jin,  X. J., Ladebaum,  I., and Khuri-Yakub,  B. T., 1998, “The Fabrication of Capacitative Ultrasonic Transducers,” J. Microelectromech. Syst., 7, pp. 295–302.
Schindel,  W., and Hutchins,  D. A., 1995, “Applications of Micromachined Capacitance Transducers in Air-Coupled Ultrasonics and Non-Destructive Evaluation,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 42, No. 1, pp. 51–58.
Bhardwaj, M. C., Neeson, I., Langron, M. E., and Vandervalk, L., 2000, “Contact-Free Ultrasound: The Final Frontier in Non-Destructive Materials Characterization,” presented at 24th Conference: An International Conference on Engineering Ceramics & Structures, American Ceramic.
Sandman, J. S., and Tittmann, B. R., 2000, “Development of an Air-Coupled Ultrasonic Sensor for High Pressure, and Temperature Applications,” presented at SPIE’s International Symposium on Nondestructive Evaluation Techniques for Aging Infrastructure & Manufacturing.

Figures

Grahic Jump Location
Acoustic images obtained by focusing on back surface using (a) conventional, and (b) high N. A. lenses (frequency: 30 MHz)
Grahic Jump Location
Acoustic images of internal structures of a plastic mold IC package using conventional lenses—(a) frequency f=30 MHz, scanning size 12.0 mm×9.0 mm; (b) frequency f=50 MHz, scanning size 12.0 mm×9.0 mm; (c) frequency f=75 MHz, scanning size 12.0 mm×9.0 mm; (d) frequency f=110 MHz, scanning size 12.0 mm×9.0 mm  
Grahic Jump Location
Acoustic image of internal structures of the same plastic mold IC package using the high N. A. lens with a frequency at 30 MHz
Grahic Jump Location
Acoustic images obtained by focusing on back surface using (a) conventional and (b) high N. A. lenses (frequency: 30 MHz), wherein the images are from the IC chip internally located in the IC package. Clearly visible are the improvement in resolution and reduction in surface features for the high N. A. lens.
Grahic Jump Location
Schematic diagram of noncontact and air-coupled transducer

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